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Performance Test for Nanometer Accuracy Capacitance Displacement Sensor

Cui, J.J. / Qu, X.H. / Kang, Y.H.

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Performance Test for Nanometer Accuracy Capacitance Displacement Sensor

Cui, J.J. / Qu, X.H. / Kang, Y.H.

Performance Test for Nanometer Accuracy Capacitance Displacement Sensor

Cui, J.J. / Qu, X.H. / Kang, Y.H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Performance Test for Nanometer Accuracy Capacitance Displacement Sensor

Contributors:

Cui, J.J. (author) / Qu, X.H. (author) / Kang, Y.H. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 898-902

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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