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Doping landscapes in the nanometer range by scanning capacitance microscopy

Anand, S. / Carlstrom, C.F. / Messmer, E.R. / Lourdudoss, S. / Landgren, G.

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Doping landscapes in the nanometer range by scanning capacitance microscopy

Anand, S. / Carlstrom, C.F. / Messmer, E.R. / Lourdudoss, S. / Landgren, G.

Doping landscapes in the nanometer range by scanning capacitance microscopy

Anand, S. / Carlstrom, C.F. / Messmer, E.R. / Lourdudoss, S. / Landgren, G.

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Document information

Title:

Doping landscapes in the nanometer range by scanning capacitance microscopy

Contributors:

Anand, S. (author) / Carlstrom, C.F. (author) / Messmer, E.R. (author) / Lourdudoss, S. (author) / Landgren, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 525-529

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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