Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer: Fid-Bau Portal

Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer

Shi, Y.B. / Zhou, Z.J. / Dong, S.F. / Tang, J.

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Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer

Shi, Y.B. / Zhou, Z.J. / Dong, S.F. / Tang, J.

Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer

Shi, Y.B. / Zhou, Z.J. / Dong, S.F. / Tang, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Design, Fabrication and Test of In-Plane MEMS Piezoresistive High-g Accelerometer

Contributors:

Shi, Y.B. (author) / Zhou, Z.J. (author) / Dong, S.F. (author) / Tang, J. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 1111-1116

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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