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An Electromechanical Tunable Grating on Silicon-on-Insulator Platform

Gao, X.M. / Shi, Z. / Li, X. / He, S.M. / Zhu, H.B. / Wang, Y.J.

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An Electromechanical Tunable Grating on Silicon-on-Insulator Platform

Gao, X.M. / Shi, Z. / Li, X. / He, S.M. / Zhu, H.B. / Wang, Y.J.

An Electromechanical Tunable Grating on Silicon-on-Insulator Platform

Gao, X.M. / Shi, Z. / Li, X. / He, S.M. / Zhu, H.B. / Wang, Y.J.

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Check availability in my library

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Document information

Title:

An Electromechanical Tunable Grating on Silicon-on-Insulator Platform

Contributors:

Gao, X.M. (author) / Shi, Z. (author) / Li, X. (author) / He, S.M. (author) / Zhu, H.B. (author) / Wang, Y.J. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 1277-1282

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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