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    Fabrication and electromechanical characterization of silicon on insulator based electrostatic micro-scanners

    New search for: Yan, D.
    New search for: Apsel, A.
    New search for: Lal, A.

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    Fabrication and electromechanical characterization of silicon on insulator based electrostatic micro-scanners

    New search for: Yan, D.
    New search for: Apsel, A.
    New search for: Lal, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication and electromechanical characterization of silicon on insulator based electrostatic micro-scanners

    New search for: Yan, D.
    New search for: Apsel, A.
    New search for: Lal, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fabrication and electromechanical characterization of silicon on insulator based electrostatic micro-scanners

    Contributors:

    Yan, D. (author) / Apsel, A. (author) / Lal, A. (author)

    Published in:

    SMART MATERIALS AND STRUCTURES ; 14 ; 775-784

    Publication date:

    2005-01-01

    Size:

    10 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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