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High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
Ali, K. (author) / Choi, K. H. (author) / Jo, J. (author) / Lee, Y. W. (author)
MATERIALS LETTERS ; 136 ; 90-94
2014-01-01
5 pages
Article (Journal)
English
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