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High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
Ali, K. (Autor:in) / Choi, K. H. (Autor:in) / Jo, J. (Autor:in) / Lee, Y. W. (Autor:in)
MATERIALS LETTERS ; 136 ; 90-94
01.01.2014
5 pages
Aufsatz (Zeitschrift)
Englisch
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