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    High-Speed Deposition of SiC Thick Film by Halide Precursor

    New search for: Han, M.X.
    New search for: Zhou, W.
    New search for: Zheng, D.H.
    New search for: Tu, R.
    New search for: Zhang, S.
    New search for: Goto, T.
    New search for: Goto, T.
    New search for: Fu, Z.
    New search for: Zhang, L.

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    High-Speed Deposition of SiC Thick Film by Halide Precursor

    New search for: Han, M.X.
    New search for: Zhou, W.
    New search for: Zheng, D.H.
    New search for: Tu, R.
    New search for: Zhang, S.
    New search for: Goto, T.
    New search for: Goto, T.
    New search for: Fu, Z.
    New search for: Zhang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High-Speed Deposition of SiC Thick Film by Halide Precursor

    New search for: Han, M.X.
    New search for: Zhou, W.
    New search for: Zheng, D.H.
    New search for: Tu, R.
    New search for: Zhang, S.
    New search for: Goto, T.
    New search for: Goto, T.
    New search for: Fu, Z.
    New search for: Zhang, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    High-Speed Deposition of SiC Thick Film by Halide Precursor

    Contributors:

    Han, M.X. (author) / Zhou, W. (author) / Zheng, D.H. (author) / Tu, R. (author) / Zhang, S. (author) / Goto, T. (author) / Goto, T. / Fu, Z. / Zhang, L.

    Published in:

    Advanced Ceramics and Novel Processing ; 37-42

    KEY ENGINEERING MATERIALS ; 616

    Publication date:

    2014-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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