Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    High rate dry etching of (BiSb)2Te3 film by CH4/H2-based plasma

    New search for: Song, J.
    New search for: Shi, X.
    New search for: Chen, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    High rate dry etching of (BiSb)2Te3 film by CH4/H2-based plasma

    New search for: Song, J.
    New search for: Shi, X.
    New search for: Chen, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High rate dry etching of (BiSb)2Te3 film by CH4/H2-based plasma

    New search for: Song, J.
    New search for: Shi, X.
    New search for: Chen, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High rate dry etching of (BiSb)2Te3 film by CH4/H2-based plasma

    Contributors:

    Song, J. (author) / Shi, X. (author) / Chen, L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 317 ; 457-461

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Mechanical alloying of BiSb semiconducting alloys

    Martin-Lopez, R. / Lenoir, B. / Devaux, X. et al. | British Library Online Contents | 1998

    Fatigue life measurement using (BiSb) Te films

    Ustinovshikov, Y. I. / Daskovsky, I. M. | British Library Online Contents | 1992

    Preparation method of Cu-doped (Bi, Sb) 2Te3 thermoelectric material and product of Cu-doped (Bi, Sb) 2Te3 thermoelectric material

    LIU FENGMING / LI JINGFENG / CAI BOWEN | European Patent Office | 2022

    Free access

    High thermoelectric properties of (Sb, Bi)2Te3 nanowire arrays by tilt-structure engineering

    Tan, Ming / Hao, Yanming / Deng, Yuan et al. | British Library Online Contents | 2018

    Controllable preparation method of P-type (Bi, Sb) 2Te3-based porous thermoelectric material

    DING ZHANHUI / ZHAO HAO / XUE YANFENG et al. | European Patent Office | 2022

    Free access
    Back to top