Self-organized nanopatterning of silicon surfaces by ion beam sputtering: Fid-Bau Portal

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Munoz-Garcia, J. / Vazquez, L. / Castro, M. / Gago, R. / Redondo-Cubero, A. / Moreno-Barrado, A. / Cuerno, R.

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Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Munoz-Garcia, J. / Vazquez, L. / Castro, M. / Gago, R. / Redondo-Cubero, A. / Moreno-Barrado, A. / Cuerno, R.

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Munoz-Garcia, J. / Vazquez, L. / Castro, M. / Gago, R. / Redondo-Cubero, A. / Moreno-Barrado, A. / Cuerno, R.

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Document information

Title:

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Contributors:

Munoz-Garcia, J. (author) / Vazquez, L. (author) / Castro, M. (author) / Gago, R. (author) / Redondo-Cubero, A. (author) / Moreno-Barrado, A. (author) / Cuerno, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 86 ; 1-44

Publication date:

2014-01-01

Size:

44 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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