Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry: Fid-Bau Portal

Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry

Cheng, J. / Wang, T. / Mei, H. / Zhou, W. / Lu, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry

Cheng, J. / Wang, T. / Mei, H. / Zhou, W. / Lu, X.

Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry

Cheng, J. / Wang, T. / Mei, H. / Zhou, W. / Lu, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry

Contributors:

Cheng, J. (author) / Wang, T. (author) / Mei, H. (author) / Zhou, W. (author) / Lu, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 320 ; 531-537

Publication date:

2014-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Cheng, Jie / Pan, Jinshan / Wang, Tongqing et al. | British Library Online Contents | 2018

Synergistic Effect of Corrosion Inhibition on Bronze by Benzotriazole and Sodium Molybdate

Hu, G. / Guo-cheng, L. / Xu, C.-c. et al. | British Library Online Contents | 2008

Synergistic Corrosion Inhibition Effect of Sodium Molybdate and Benzotriazole for Brass in Chlorine Dioxide Solution

Wang, K.-t. / Lu, N. / Gao, J.-l. et al. | British Library Online Contents | 2012

Copper corrosion mitigation by binary inhibitor compositions of potassium sorbate and benzotriazole

Gelman, D. / Starosvetsky, D. / Ein-Eli, Y. | British Library Online Contents | 2014

Corrosion inhibition of copper, mild steel and galvanically coupled copper-mild steel in artificial sea water in presence of 1H-benzotriazole, sodium molybdate and sodium phosphate

Sabet Bokati, Kazem / Dehghanian, Changiz / Yari, Saeed | British Library Online Contents | 2017