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One-step firing for electroded PZT thick films applied to MEMS
One-step firing for electroded PZT thick films applied to MEMS
One-step firing for electroded PZT thick films applied to MEMS
Debeda, H. (author) / Clement, P. (author) / Llobet, E. (author) / Lucat, C. (author)
SMART MATERIALS AND STRUCTURES ; 24 ; 025020
2015-01-01
25020 pages
Article (Journal)
English
DDC:
530
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