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One-step firing for electroded PZT thick films applied to MEMS

Debeda, H. / Clement, P. / Llobet, E. / Lucat, C.

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One-step firing for electroded PZT thick films applied to MEMS

Debeda, H. / Clement, P. / Llobet, E. / Lucat, C.

One-step firing for electroded PZT thick films applied to MEMS

Debeda, H. / Clement, P. / Llobet, E. / Lucat, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

One-step firing for electroded PZT thick films applied to MEMS

Contributors:

Debeda, H. (author) / Clement, P. (author) / Llobet, E. (author) / Lucat, C. (author)

Published in:

SMART MATERIALS AND STRUCTURES ; 24 ; 025020

Publication date:

2015-01-01

Size:

25020 pages

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

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