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    Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices

    New search for: Schroeder, J. L.
    New search for: Saha, B.
    New search for: Garbrecht, M.
    New search for: Schell, N.
    New search for: Sands, T. D.
    New search for: Birch, J.

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    Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices

    New search for: Schroeder, J. L.
    New search for: Saha, B.
    New search for: Garbrecht, M.
    New search for: Schell, N.
    New search for: Sands, T. D.
    New search for: Birch, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices

    New search for: Schroeder, J. L.
    New search for: Saha, B.
    New search for: Garbrecht, M.
    New search for: Schell, N.
    New search for: Sands, T. D.
    New search for: Birch, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices

    Contributors:

    Schroeder, J. L. (author) / Saha, B. (author) / Garbrecht, M. (author) / Schell, N. (author) / Sands, T. D. (author) / Birch, J. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 50 ; 3200-3206

    Publication date:

    2015-01-01

    Size:

    7 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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