Influences of Working Power on Properties for Boron Films Deposited by R. F. Magnetron Sputtering: Fid-Bau Portal

Influences of Working Power on Properties for Boron Films Deposited by R. F. Magnetron Sputtering

Yang, Y.M. / Ren, B. / Huang, J. / Tang, K. / Wang, J.N. / Yu, H.Z. / Wang, L.J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Influences of Working Power on Properties for Boron Films Deposited by R. F. Magnetron Sputtering

Yang, Y.M. / Ren, B. / Huang, J. / Tang, K. / Wang, J.N. / Yu, H.Z. / Wang, L.J.

Influences of Working Power on Properties for Boron Films Deposited by R. F. Magnetron Sputtering

Yang, Y.M. / Ren, B. / Huang, J. / Tang, K. / Wang, J.N. / Yu, H.Z. / Wang, L.J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Influences of Working Power on Properties for Boron Films Deposited by R. F. Magnetron Sputtering

Contributors:

Yang, Y.M. (author) / Ren, B. (author) / Huang, J. (author) / Tang, K. (author) / Wang, J.N. (author) / Yu, H.Z. (author) / Wang, L.J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 633 ; 210-213

Publication date:

2015-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

ZHANG, C. / DING, W. / WANG, H. et al. | British Library Conference Proceedings | 2009

Effects of sputtering power on mechanical properties of Cr films deposited by magnetron sputtering

Kim, K. / Park, M. / Lee, W. et al. | British Library Online Contents | 2008

Properties of titanium thin films deposited by dc magnetron sputtering

Jeyachandran, Y. L. / Karunagaran, B. / Narayandass, S. K. et al. | British Library Online Contents | 2006

Properties of ZnS Films Deposited by Radio Frequency Magnetron Sputtering

Zhang, L. / Huang, J. / Yang, H.M. et al. | British Library Online Contents | 2014

Structural properties of AlSn thin films deposited by magnetron sputtering

De Rosa, H. / Cardus, G. / Broitman, E. et al. | British Library Online Contents | 2001