Calculation and synthesis of ZrC by CVD from ZrCl4-C3H6-H2-Ar system with high H2 percentage: Fid-Bau Portal

Calculation and synthesis of ZrC by CVD from ZrCl4-C3H6-H2-Ar system with high H2 percentage

Zhu, Y. / Cheng, L. / Ma, B. / Gao, S. / Feng, W. / Liu, Y. / Zhang, L.

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Calculation and synthesis of ZrC by CVD from ZrCl4-C3H6-H2-Ar system with high H2 percentage

Zhu, Y. / Cheng, L. / Ma, B. / Gao, S. / Feng, W. / Liu, Y. / Zhang, L.

Calculation and synthesis of ZrC by CVD from ZrCl4-C3H6-H2-Ar system with high H2 percentage

Zhu, Y. / Cheng, L. / Ma, B. / Gao, S. / Feng, W. / Liu, Y. / Zhang, L.

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Document information

Title:

Calculation and synthesis of ZrC by CVD from ZrCl4-C3H6-H2-Ar system with high H2 percentage

Contributors:

Zhu, Y. (author) / Cheng, L. (author) / Ma, B. (author) / Gao, S. (author) / Feng, W. (author) / Liu, Y. (author) / Zhang, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 332 ; 591-598

Publication date:

2015-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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