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    Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures

    New search for: Brodskii, V. V.
    New search for: Rykova, E. A.
    New search for: Bagatur'yants, A. A.
    New search for: Korkin, A. A.

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    Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures

    New search for: Brodskii, V. V.
    New search for: Rykova, E. A.
    New search for: Bagatur'yants, A. A.
    New search for: Korkin, A. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures

    New search for: Brodskii, V. V.
    New search for: Rykova, E. A.
    New search for: Bagatur'yants, A. A.
    New search for: Korkin, A. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures

    Contributors:

    Brodskii, V. V. (author) / Rykova, E. A. (author) / Bagatur'yants, A. A. (author) / Korkin, A. A. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE ; 24 ; 278-283

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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