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Preparation of g-Al2O3 films by laser chemical vapor deposition

Gao, M. / Ito, A. / Goto, T.

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Preparation of g-Al2O3 films by laser chemical vapor deposition

Gao, M. / Ito, A. / Goto, T.

Preparation of g-Al2O3 films by laser chemical vapor deposition

Gao, M. / Ito, A. / Goto, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of g-Al2O3 films by laser chemical vapor deposition

Contributors:

Gao, M. (author) / Ito, A. (author) / Goto, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 340 ; 160-165

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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