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Thermal stability of AlN films prepared by ion beam assisted deposition

Meng, J. p. / Liu, X. p. / Fu, Z. q. / Wang, X. j. / Hao, L.

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Thermal stability of AlN films prepared by ion beam assisted deposition

Meng, J. p. / Liu, X. p. / Fu, Z. q. / Wang, X. j. / Hao, L.

Thermal stability of AlN films prepared by ion beam assisted deposition

Meng, J. p. / Liu, X. p. / Fu, Z. q. / Wang, X. j. / Hao, L.

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Check availability in my library

Order at Subito €

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Document information

Title:

Thermal stability of AlN films prepared by ion beam assisted deposition

Contributors:

Meng, J. p. (author) / Liu, X. p. (author) / Fu, Z. q. (author) / Wang, X. j. (author) / Hao, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 347 ; 109-115

Publication date:

2015-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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