Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films: Fid-Bau Portal

Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films

Tien, C. L. / Yu, K. C. / Tsai, T. Y. / Liu, M. C.

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Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films

Tien, C. L. / Yu, K. C. / Tsai, T. Y. / Liu, M. C.

Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films

Tien, C. L. / Yu, K. C. / Tsai, T. Y. / Liu, M. C.

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Check availability in my library

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Document information

Title:

Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films

Contributors:

Tien, C. L. (author) / Yu, K. C. (author) / Tsai, T. Y. (author) / Liu, M. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 354 ; 79-84

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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