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Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse
Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse
Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse
APPLIED SURFACE SCIENCE ; 356 ; 695-700
2015-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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