Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption

    New search for: Lee, D.
    New search for: Lee, H.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption

    New search for: Lee, D.
    New search for: Lee, H.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption

    New search for: Lee, D.
    New search for: Lee, H.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption

    Contributors:

    Lee, D. (author) / Lee, H. (author) / Jeong, H. (author)

    Published in:

    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 29 ; 5057-5062

    Publication date:

    2015-01-01

    Size:

    6 pages

    ISSN:

    1738-494X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Spray process of slurry feed

    Auld, S.J.M. | Engineering Index Backfile | 1930

    High polymer deep hole positioning self-enclosed slurry nozzle and slurry system and method thereof

    WANG FUMING / FANG HONGYUAN / WANG YINGLI et al. | European Patent Office | 2020

    Free access

    SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING

    European Patent Office | 2022

    Free access

    Slurry supply nozzle for desulfurization equipment with different materials

    LEE KYE IL / YU HYEONG SOON | European Patent Office | 2023

    Free access

    SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING

    SUN JENNIFER Y / KANUNGO BIRAJA P / CHEN YIKAI et al. | European Patent Office | 2017

    Free access
    Back to top