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AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Li, C. / Liu, X. Z. / Peng, B. / Shu, L. / Li, Y. R.

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AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Li, C. / Liu, X. Z. / Peng, B. / Shu, L. / Li, Y. R.

AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Li, C. / Liu, X. Z. / Peng, B. / Shu, L. / Li, Y. R.

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Order at Subito €

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Document information

Title:

AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Contributors:

Li, C. (author) / Liu, X. Z. (author) / Peng, B. (author) / Shu, L. (author) / Li, Y. R. (author)

Published in:

RARE METALS -BEIJING- ENGLISH EDITION ; 35 ; 408-411

Publication date:

2016-01-01

Size:

4 pages

ISSN:

1001-0521

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669

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