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    Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating

    New search for: Qiu, W. Q.
    New search for: Liu, Z. W.
    New search for: Zhou, K. S.

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    Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating

    New search for: Qiu, W. Q.
    New search for: Liu, Z. W.
    New search for: Zhou, K. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating

    New search for: Qiu, W. Q.
    New search for: Liu, Z. W.
    New search for: Zhou, K. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating

    Contributors:

    Qiu, W. Q. (author) / Liu, Z. W. (author) / Zhou, K. S. (author)

    Published in:

    RARE METALS -BEIJING- ENGLISH EDITION ; 35 ; 520-525

    Publication date:

    2016-01-01

    Size:

    6 pages

    ISSN:

    1001-0521

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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