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Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating
Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating
Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathodic arc ion plating
Qiu, W. Q. (author) / Liu, Z. W. (author) / Zhou, K. S. (author)
RARE METALS -BEIJING- ENGLISH EDITION ; 35 ; 520-525
2016-01-01
6 pages
Article (Journal)
English
DDC:
669
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