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Synthesis of aluminum nitride thin films by filtered arc ion plating deposition

Yan, X. / Dong, Y. / Li, H. / Gong, J. / Sun, C.

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Synthesis of aluminum nitride thin films by filtered arc ion plating deposition

Yan, X. / Dong, Y. / Li, H. / Gong, J. / Sun, C.

Synthesis of aluminum nitride thin films by filtered arc ion plating deposition

Yan, X. / Dong, Y. / Li, H. / Gong, J. / Sun, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Synthesis of aluminum nitride thin films by filtered arc ion plating deposition

Contributors:

Yan, X. (author) / Dong, Y. (author) / Li, H. (author) / Gong, J. (author) / Sun, C. (author)

Published in:

MATERIALS LETTERS ; 64 ; 1261-1263

Publication date:

2010-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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