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    Experiment and simulation study of laser dicing silicon with water-jet

    New search for: Bao, J.
    New search for: Long, Y.
    New search for: Tong, Y.
    New search for: Yang, X.
    New search for: Zhang, B.
    New search for: Zhou, Z.

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    Experiment and simulation study of laser dicing silicon with water-jet

    New search for: Bao, J.
    New search for: Long, Y.
    New search for: Tong, Y.
    New search for: Yang, X.
    New search for: Zhang, B.
    New search for: Zhou, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Experiment and simulation study of laser dicing silicon with water-jet

    New search for: Bao, J.
    New search for: Long, Y.
    New search for: Tong, Y.
    New search for: Yang, X.
    New search for: Zhang, B.
    New search for: Zhou, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Experiment and simulation study of laser dicing silicon with water-jet

    Contributors:

    Bao, J. (author) / Long, Y. (author) / Tong, Y. (author) / Yang, X. (author) / Zhang, B. (author) / Zhou, Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 387 ; 491-496

    Publication date:

    2016-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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