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    Laser Dicing of Silicon Wafer

    New search for: Tang, Y.
    New search for: Fuh, J.Y.H.
    New search for: Loh, H.T.
    New search for: Wong, Y.S.
    New search for: Lim, Y.K.
    New search for: Li, X.
    New search for: Lu, L.
    New search for: Tu, J.
    New search for: Zhao, X.
    New search for: Zhu, T.

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    Laser Dicing of Silicon Wafer

    New search for: Tang, Y.
    New search for: Fuh, J.Y.H.
    New search for: Loh, H.T.
    New search for: Wong, Y.S.
    New search for: Lim, Y.K.
    New search for: Li, X.
    New search for: Lu, L.
    New search for: Tu, J.
    New search for: Zhao, X.
    New search for: Zhu, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Laser Dicing of Silicon Wafer

    New search for: Tang, Y.
    New search for: Fuh, J.Y.H.
    New search for: Loh, H.T.
    New search for: Wong, Y.S.
    New search for: Lim, Y.K.
    New search for: Li, X.
    New search for: Lu, L.
    New search for: Tu, J.
    New search for: Zhao, X.
    New search for: Zhu, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Laser Dicing of Silicon Wafer

    Contributors:

    Tang, Y. (author) / Fuh, J.Y.H. (author) / Loh, H.T. (author) / Wong, Y.S. (author) / Lim, Y.K. (author) / Li, X. / Lu, L. / Tu, J. / Zhao, X. / Zhu, T.

    Published in:

    Advances in Functional Materials ; 153-160

    SURFACE REVIEW AND LETTERS ; 15

    Publication date:

    2008-01-01

    Size:

    8 pages

    ISSN:

    0218-625X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530.417

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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