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    Study on Influence Laws of Surface Roughness of Micro-Groove in Single Crystal Silicon under Diamond Fly-Cutting

    New search for: Yan, Y. Y.
    New search for: Wang, R. X.
    New search for: Zhao, B.

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    Study on Influence Laws of Surface Roughness of Micro-Groove in Single Crystal Silicon under Diamond Fly-Cutting

    New search for: Yan, Y. Y.
    New search for: Wang, R. X.
    New search for: Zhao, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on Influence Laws of Surface Roughness of Micro-Groove in Single Crystal Silicon under Diamond Fly-Cutting

    New search for: Yan, Y. Y.
    New search for: Wang, R. X.
    New search for: Zhao, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study on Influence Laws of Surface Roughness of Micro-Groove in Single Crystal Silicon under Diamond Fly-Cutting

    Contributors:

    Yan, Y. Y. (author) / Wang, R. X. (author) / Zhao, B. (author)

    Published in:

    Key engineering materials ; 667 ; 142-148

    Publication date:

    2016-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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