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GaAsP on SiGe/Si material quality improvements with in-situ stress sensor and resulting tandem device performance

Schmieder, Kenneth J. / Gerger, Andrew / Diaz, Martin / Pulwin, Ziggy / Curtin, Michael / Wang, Li / Ebert, Chris / Lochtefeld, Anthony / Opila, Robert L. / Barnett, Allen

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GaAsP on SiGe/Si material quality improvements with in-situ stress sensor and resulting tandem device performance

Schmieder, Kenneth J. / Gerger, Andrew / Diaz, Martin / Pulwin, Ziggy / Curtin, Michael / Wang, Li / Ebert, Chris / Lochtefeld, Anthony / Opila, Robert L. / Barnett, Allen

GaAsP on SiGe/Si material quality improvements with in-situ stress sensor and resulting tandem device performance

Schmieder, Kenneth J. / Gerger, Andrew / Diaz, Martin / Pulwin, Ziggy / Curtin, Michael / Wang, Li / Ebert, Chris / Lochtefeld, Anthony / Opila, Robert L. / Barnett, Allen

Access

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

GaAsP on SiGe/Si material quality improvements with in-situ stress sensor and resulting tandem device performance

Contributors:

Schmieder, Kenneth J. (author) / Gerger, Andrew (author) / Diaz, Martin (author) / Pulwin, Ziggy (author) / Curtin, Michael (author) / Wang, Li (author) / Ebert, Chris (author) / Lochtefeld, Anthony (author) / Opila, Robert L. (author) / Barnett, Allen (author)

Published in:

Materials science in semiconductor processing ; 39 ; 614-620

Publication date:

2015-01-01

Size:

7 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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