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Using the acetylacetonates of zinc and aluminium for the Metalorganic Chemical Vapour Deposition of aluminium doped zinc oxide films
Using the acetylacetonates of zinc and aluminium for the Metalorganic Chemical Vapour Deposition of aluminium doped zinc oxide films
Using the acetylacetonates of zinc and aluminium for the Metalorganic Chemical Vapour Deposition of aluminium doped zinc oxide films
Nebatti, Abdelkader (author) / Pflitsch, Christian (author) / Curdts, Benjamin (author) / Atakan, Burak (author)
Materials science in semiconductor processing ; 39 ; 467-475
2015-01-01
9 pages
Article (Journal)
English
DDC:
621.38152
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