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Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Khan, A. H. (author) / Odeh, M. F. (author) / Meese, J. M. (author) / Charlson, E. M. (author)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 4314
1994-01-01
4314 pages
Article (Journal)
Unknown
DDC:
620.11
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