Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111): Fid-Bau Portal

Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)

Junaid, M. / Chen, Y.-T. / Palisaitis, J. / Garbrecht, M. / Hsiao, C.-L. / Persson, P.O.Å. / Hultman, L. / Birch, J.

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Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)

Junaid, M. / Chen, Y.-T. / Palisaitis, J. / Garbrecht, M. / Hsiao, C.-L. / Persson, P.O.Å. / Hultman, L. / Birch, J.

Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)

Junaid, M. / Chen, Y.-T. / Palisaitis, J. / Garbrecht, M. / Hsiao, C.-L. / Persson, P.O.Å. / Hultman, L. / Birch, J.

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Title:

Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)

Contributors:

Junaid, M. (author) / Chen, Y.-T. (author) / Palisaitis, J. (author) / Garbrecht, M. (author) / Hsiao, C.-L. (author) / Persson, P.O.Å. (author) / Hultman, L. (author) / Birch, J. (author)

Published in:

Materials science in semiconductor processing ; 39 ; 702-710

Publication date:

2015-01-01

Size:

9 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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