Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings

    New search for: Chang, Zue-Chin
    New search for: Tsai, Du-Cheng
    New search for: Chen, Erh-Chiang

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings

    New search for: Chang, Zue-Chin
    New search for: Tsai, Du-Cheng
    New search for: Chen, Erh-Chiang

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings

    New search for: Chang, Zue-Chin
    New search for: Tsai, Du-Cheng
    New search for: Chen, Erh-Chiang

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings

    Contributors:

    Chang, Zue-Chin (author) / Tsai, Du-Cheng (author) / Chen, Erh-Chiang (author)

    Published in:

    Materials science in semiconductor processing ; 39 ; 30-39

    Publication date:

    2015-01-01

    Size:

    10 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings

    Barshilia, H.C. / Deepthi, B. / Rajam, K.S. et al. | British Library Online Contents | 2008

    Twin Magnetron Sputtered Solar Control Coatings

    Ruske, M. / Englert, M. / Trube, J. et al. | British Library Conference Proceedings | 2001

    Tribological properties of magnetron-sputtered TiC coatings

    Feng, L. / Tang, J. / Zabinski, J. S. | British Library Online Contents | 1998

    Influence of reactive gas and temperature on structural properties of magnetron sputtered CrSiN coatings

    Shah, H. N. / Jayaganthan, R. / Kaur, D. | British Library Online Contents | 2011

    Microstructure and mechanical properties of reactive magnetron sputtered Ti-B-C-N nanocomposite coatings

    Luo, Q. H. / Lu, Y. H. | British Library Online Contents | 2011

    Back to top