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Annealing effects on electrical and optical properties of a-Si:H layer deposited by PECVD
Annealing effects on electrical and optical properties of a-Si:H layer deposited by PECVD
Annealing effects on electrical and optical properties of a-Si:H layer deposited by PECVD
Elghoul, N. (author) / Kraiem, S. (author) / Jemai, R. (author) / Zebentout, B. (author) / Khirouni, K. (author)
Materials science in semiconductor processing ; 40 ; 302-309
2015-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
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