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Improved photoelectric properties of p-µc-Si:H/p-a-SiOx:H window layer deposited by RF-PECVD
Improved photoelectric properties of p-µc-Si:H/p-a-SiOx:H window layer deposited by RF-PECVD
Improved photoelectric properties of p-µc-Si:H/p-a-SiOx:H window layer deposited by RF-PECVD
Qu, Xingling (author) / Jin, Jing (author) / Jin, Qi (author) / Huang, Lu (author) / Zhu, Wenqing (author) / Shi, Weimin (author)
Materials science in semiconductor processing ; 71 ; 54-60
2017-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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