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    Spectroscopic ellipsometry investigation of microcrystalline fractions in p-type hydrogenated microcrystalline silicon oxide (p-μc-SiOx:H) ultra-thin films

    New search for: Lertvanithphol, T.
    New search for: Rakreungdet, W.
    New search for: Horprathum, M.
    New search for: Eiamchai, P.
    New search for: Sritharathikhun, J.
    New search for: Inthisang, S.
    New search for: Krajangsang, T.
    New search for: Sriprapha, K.
    New search for: Limwichean, S.
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    New search for: Chananonnawathorn, C.
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    Spectroscopic ellipsometry investigation of microcrystalline fractions in p-type hydrogenated microcrystalline silicon oxide (p-μc-SiOx:H) ultra-thin films

    New search for: Lertvanithphol, T.
    New search for: Rakreungdet, W.
    New search for: Horprathum, M.
    New search for: Eiamchai, P.
    New search for: Sritharathikhun, J.
    New search for: Inthisang, S.
    New search for: Krajangsang, T.
    New search for: Sriprapha, K.
    New search for: Limwichean, S.
    New search for: Nuntawong, N.
    New search for: Patthanasettakul, V.
    New search for: Chananonnawathorn, C.
    New search for: Klamchuen, A.
    New search for: Wutikhun, T.
    New search for: Chindaudom, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Spectroscopic ellipsometry investigation of microcrystalline fractions in p-type hydrogenated microcrystalline silicon oxide (p-μc-SiOx:H) ultra-thin films

    New search for: Lertvanithphol, T.
    New search for: Rakreungdet, W.
    New search for: Horprathum, M.
    New search for: Eiamchai, P.
    New search for: Sritharathikhun, J.
    New search for: Inthisang, S.
    New search for: Krajangsang, T.
    New search for: Sriprapha, K.
    New search for: Limwichean, S.
    New search for: Nuntawong, N.
    New search for: Patthanasettakul, V.
    New search for: Chananonnawathorn, C.
    New search for: Klamchuen, A.
    New search for: Wutikhun, T.
    New search for: Chindaudom, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Spectroscopic ellipsometry investigation of microcrystalline fractions in p-type hydrogenated microcrystalline silicon oxide (p-μc-SiOx:H) ultra-thin films

    Contributors:

    Lertvanithphol, T. (author) / Rakreungdet, W. (author) / Horprathum, M. (author) / Eiamchai, P. (author) / Sritharathikhun, J. (author) / Inthisang, S. (author) / Krajangsang, T. (author) / Sriprapha, K. (author) / Limwichean, S. (author) / Nuntawong, N. (author)

    Published in:

    Materials science in semiconductor processing ; 68 ; 327-333

    Publication date:

    2017-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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