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Lanthanide rare earth oxide thin film as an alternative gate oxide
Lanthanide rare earth oxide thin film as an alternative gate oxide
Lanthanide rare earth oxide thin film as an alternative gate oxide
Goh, Kian Heng (author) / Haseeb, A.S.M.A. (author) / Wong, Yew Hoong (author)
Materials science in semiconductor processing ; 68 ; 302-315
2017-01-01
14 pages
Article (Journal)
English
DDC:
621.38152
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