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Subtle gate oxide defect elimination to improve the reliability of a 32M-bit SRAM product
Subtle gate oxide defect elimination to improve the reliability of a 32M-bit SRAM product
Subtle gate oxide defect elimination to improve the reliability of a 32M-bit SRAM product
Kuo, Chinte (author) / Wei Zhang, David (author) / Wei, Wen (author) / Chen, Frank (author) / Pang, Albert (author)
Materials science in semiconductor processing ; 41 ; 485-490
2016-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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Subtle gate oxide defect elimination to improve the reliability of a 32M-bit SRAM product
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