Thermal annealing performance of sulfur-hyperdoped black silicon fabricated using a Nd:YAG nanosecond-pulsed laser: Fid-Bau Portal

Thermal annealing performance of sulfur-hyperdoped black silicon fabricated using a Nd:YAG nanosecond-pulsed laser

Wen, C. / Chen, W. / Chen, Y.P. / Liu, K.J. / Li, X.H. / Hu, S.F. / Yang, Y.J.

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Thermal annealing performance of sulfur-hyperdoped black silicon fabricated using a Nd:YAG nanosecond-pulsed laser

Wen, C. / Chen, W. / Chen, Y.P. / Liu, K.J. / Li, X.H. / Hu, S.F. / Yang, Y.J.

Thermal annealing performance of sulfur-hyperdoped black silicon fabricated using a Nd:YAG nanosecond-pulsed laser

Wen, C. / Chen, W. / Chen, Y.P. / Liu, K.J. / Li, X.H. / Hu, S.F. / Yang, Y.J.

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Title:

Thermal annealing performance of sulfur-hyperdoped black silicon fabricated using a Nd:YAG nanosecond-pulsed laser

Contributors:

Wen, C. (author) / Chen, W. (author) / Chen, Y.P. (author) / Liu, K.J. (author) / Li, X.H. (author) / Hu, S.F. (author) / Yang, Y.J. (author)

Published in:

Materials research bulletin ; 93 ; 238-244

Publication date:

2017-01-01

Size:

7 pages

ISSN:

0025-5408

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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