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    C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

    New search for: Lin, Jianliang
    New search for: Chistyakov, Roman

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    C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

    New search for: Lin, Jianliang
    New search for: Chistyakov, Roman

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

    New search for: Lin, Jianliang
    New search for: Chistyakov, Roman

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    C-axis orientated AlN films deposited using deep oscillation magnetron sputtering

    Contributors:

    Lin, Jianliang (author) / Chistyakov, Roman (author)

    Published in:

    Applied surface science ; 396 ; 129-137

    Publication date:

    2017-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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