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    Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

    New search for: Lin, Bo-Cheng
    New search for: Ku, Ching-Shun
    New search for: Lee, Hsin-Yi
    New search for: Chakroborty, Subhendu
    New search for: Wu, Albert T.

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    Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

    New search for: Lin, Bo-Cheng
    New search for: Ku, Ching-Shun
    New search for: Lee, Hsin-Yi
    New search for: Chakroborty, Subhendu
    New search for: Wu, Albert T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

    New search for: Lin, Bo-Cheng
    New search for: Ku, Ching-Shun
    New search for: Lee, Hsin-Yi
    New search for: Chakroborty, Subhendu
    New search for: Wu, Albert T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

    Contributors:

    Lin, Bo-Cheng (author) / Ku, Ching-Shun (author) / Lee, Hsin-Yi (author) / Chakroborty, Subhendu (author) / Wu, Albert T. (author)

    Published in:

    Applied surface science ; 426 ; 224-228

    Publication date:

    2017-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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