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    Plasma etching behavior of Y2O3 ceramics: Comparative study with Al2O3

    New search for: Cao, Yu-Chao
    New search for: Zhao, Lei
    New search for: Luo, Jin
    New search for: Wang, Ke
    New search for: Zhang, Bo-Ping
    New search for: Yokota, Hiroki
    New search for: Ito, Yoshiyasu
    New search for: Li, Jing-Feng

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    Plasma etching behavior of Y2O3 ceramics: Comparative study with Al2O3

    New search for: Cao, Yu-Chao
    New search for: Zhao, Lei
    New search for: Luo, Jin
    New search for: Wang, Ke
    New search for: Zhang, Bo-Ping
    New search for: Yokota, Hiroki
    New search for: Ito, Yoshiyasu
    New search for: Li, Jing-Feng

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma etching behavior of Y2O3 ceramics: Comparative study with Al2O3

    New search for: Cao, Yu-Chao
    New search for: Zhao, Lei
    New search for: Luo, Jin
    New search for: Wang, Ke
    New search for: Zhang, Bo-Ping
    New search for: Yokota, Hiroki
    New search for: Ito, Yoshiyasu
    New search for: Li, Jing-Feng

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Plasma etching behavior of Y2O3 ceramics: Comparative study with Al2O3

    Contributors:

    Cao, Yu-Chao (author) / Zhao, Lei (author) / Luo, Jin (author) / Wang, Ke (author) / Zhang, Bo-Ping (author) / Yokota, Hiroki (author) / Ito, Yoshiyasu (author) / Li, Jing-Feng (author)

    Published in:

    Applied surface science ; 366 ; 304-309

    Publication date:

    2016-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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