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Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications
Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications
Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications
Fu, Sulei (author) / Li, Qi (author) / Gao, Shuang (author) / Wang, Guangyue (author) / Zeng, Fei (author) / Pan, Feng (author)
Applied surface science ; 402 ; 392-399
2017-01-01
8 pages
Article (Journal)
English
DDC:
620.44
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