Room-temperature growth of ultrasmooth AIN epitaxial thin films on sapphire with NiO buffer layer: Fid-Bau Portal

Room-temperature growth of ultrasmooth AIN epitaxial thin films on sapphire with NiO buffer layer

Sasaki, A. / Liu, J. / Hara, W. / Akiba, S. / Saito, K. / Yodo, T. / Yoshimoto, M.

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Room-temperature growth of ultrasmooth AIN epitaxial thin films on sapphire with NiO buffer layer

Sasaki, A. / Liu, J. / Hara, W. / Akiba, S. / Saito, K. / Yodo, T. / Yoshimoto, M.

Room-temperature growth of ultrasmooth AIN epitaxial thin films on sapphire with NiO buffer layer

Sasaki, A. / Liu, J. / Hara, W. / Akiba, S. / Saito, K. / Yodo, T. / Yoshimoto, M.

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Document information

Title:

Room-temperature growth of ultrasmooth AIN epitaxial thin films on sapphire with NiO buffer layer

Contributors:

Sasaki, A. (author) / Liu, J. (author) / Hara, W. (author) / Akiba, S. (author) / Saito, K. (author) / Yodo, T. (author) / Yoshimoto, M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 2725-2729

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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