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Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a 'top-to-bottom' level patterning sequence
Choi, Sungwoo (author) / Kook, YunHo (author) / Kim, ChulHo (author) / Yoo, SoonSung (author) / Park, Kwon-Shik (author) / Lee, Jinhyung (author) / Park, Changsu (author) / Ok, Jong G. (author) / Kang, Shinill (author)
Applied surface science ; 428 ; 895-899
2018-01-01
5 pages
Article (Journal)
English
DDC:
620.44
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