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Epitaxial growth of high quality AlN films on Si substrates
Epitaxial growth of high quality AlN films on Si substrates
Epitaxial growth of high quality AlN films on Si substrates
Yang, Meijuan (author) / Wang, Wenliang (author) / Lin, Yunhao (author) / Yang, Weijia (author) / Li, Guoqiang (author)
MATERIALS LETTERS ; 182 ; 277-280
2016-01-01
4 pages
Article (Journal)
Unknown
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