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Thermally induced irreversibility in the conductivity of germanium nitride and oxynitride films
Thermally induced irreversibility in the conductivity of germanium nitride and oxynitride films
Thermally induced irreversibility in the conductivity of germanium nitride and oxynitride films
Pinto, N. (author) / Caproli, F. (author) / Maggioni, G. (author) / Carturan, S. (author) / Napoli, D.R. (author)
Materials science in semiconductor processing ; 74 ; 57-63
2018-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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