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Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C.

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Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C.

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Selective etching of PDMS: Etching technique for application as a positive tone resist

Contributors:

Szilasi, S.Z. (author) / Cserháti, C. (author)

Published in:

Applied surface science ; 457 ; 662-669

Publication date:

2018-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching as a negative tone resist

Szilasi, S.Z. / Juhasz, L. | British Library Online Contents | 2018

Analysis of sidewall buildup during trilevel resist etching of metal

Ha, J. H. / Jung, J.-K. / Seol, Y.-S. et al. | British Library Online Contents | 1997

Diamond growth on carbide surfaces using a selective etching technique

Grannen, K. J. / Chang, R. P. H. | British Library Online Contents | 1994