Selective etching of PDMS: Etching as a negative tone resist: Fid-Bau Portal

Selective etching of PDMS: Etching as a negative tone resist

Szilasi, S.Z. / Juhasz, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Selective etching of PDMS: Etching as a negative tone resist

Szilasi, S.Z. / Juhasz, L.

Selective etching of PDMS: Etching as a negative tone resist

Szilasi, S.Z. / Juhasz, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Selective etching of PDMS: Etching as a negative tone resist

Contributors:

Szilasi, S.Z. (author) / Juhasz, L. (author)

Published in:

Applied surface science ; 447 ; 697-703

Publication date:

2018-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z. / Cserháti, C. | British Library Online Contents | 2018

Analysis of sidewall buildup during trilevel resist etching of metal

Ha, J. H. / Jung, J.-K. / Seol, Y.-S. et al. | British Library Online Contents | 1997

Selective etching of silicon in aqueous KOH

Chen, L.-C. / Chen, M. / Wan, C.-C. et al. | British Library Online Contents | 1995