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    Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

    New search for: Sun, Yu
    New search for: Liu, Yilun
    New search for: Chen, Xuefeng
    New search for: Zhai, Zhi
    New search for: Xu, Fei
    New search for: Liu, Yijun

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    Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

    New search for: Sun, Yu
    New search for: Liu, Yilun
    New search for: Chen, Xuefeng
    New search for: Zhai, Zhi
    New search for: Xu, Fei
    New search for: Liu, Yijun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

    New search for: Sun, Yu
    New search for: Liu, Yilun
    New search for: Chen, Xuefeng
    New search for: Zhai, Zhi
    New search for: Xu, Fei
    New search for: Liu, Yijun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

    Contributors:

    Sun, Yu (author) / Liu, Yilun (author) / Chen, Xuefeng (author) / Zhai, Zhi (author) / Xu, Fei (author) / Liu, Yijun (author)

    Published in:

    Applied surface science ; 406 ; 178-185

    Publication date:

    2017-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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