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Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
Sun, Yu (Autor:in) / Liu, Yilun (Autor:in) / Chen, Xuefeng (Autor:in) / Zhai, Zhi (Autor:in) / Xu, Fei (Autor:in) / Liu, Yijun (Autor:in)
Applied surface science ; 406 ; 178-185
01.01.2017
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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